Conference
Interfacial adhesion of copper-low k interconnects
| Τίτλος: | Interfacial adhesion of copper-low k interconnects |
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| Συγγραφείς: | Andideh, E., Scherban, T., Sun, B., Blaine, J., Block, C., Jin, B. |
| Πηγή: | Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :257-259 2001 |
| Relation: | Proceedings of the IEEE 2001 International Interconnect Technology Conference |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 0780366786 9780780366787 |
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| DOI: | 10.1109/IITC.2001.930077 |