Conference
Ultrathin CVD barrier/seed for 0.1 /spl mu/m dual damascene Cu interconnects
| Title: | Ultrathin CVD barrier/seed for 0.1 /spl mu/m dual damascene Cu interconnects |
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| Authors: | Block, C., McGregor, P., Kuhn, M., Drosd, C. |
| Source: | Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :210-212 2001 |
| Relation: | Proceedings of the IEEE 2001 International Interconnect Technology Conference |
| Database: | IEEE Xplore Digital Library |
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