Conference
Combined Experimental and Simulation Studies of a Multi-Parameter Coupled Microwave Plasma Process for High-Rate and Uniform Wafer-Level Photoresist Stripping
| Τίτλος: | Combined Experimental and Simulation Studies of a Multi-Parameter Coupled Microwave Plasma Process for High-Rate and Uniform Wafer-Level Photoresist Stripping |
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| Συγγραφείς: | Xian, Jian-Wei, Zhu, Yang-Lei, Li, Hai-Ping, Ma, Xiao, Zhang, Xin-Ping |
| Πηγή: | 2026 27th International Conference on Electronic Packaging Technology (ICEPT) Electronic Packaging Technology (ICEPT), 2026 27th International Conference on. :1-6 Aug, 2026 |
| Relation: | 2026 27th International Conference on Electronic Packaging Technology (ICEPT) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 9798319531117 9798319531124 |
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| ISSN: | 28369734 |
| DOI: | 10.1109/ICEPT71373.2026.11690139 |