Structural and optical properties of sputtered carbon films on Cu buffer-layer for sensing applications

Λεπτομέρειες βιβλιογραφικής εγγραφής
Τίτλος: Structural and optical properties of sputtered carbon films on Cu buffer-layer for sensing applications
Συγγραφείς: Barreto, Luiz M. M., Santos, Antonio D. Dos, Araki, Koiti, Nakamura, Marcelo, Luciana Kassab, R. P.
Πηγή: 2026 40th Symposium on Microelectronics Technology and Devices (SBMicro) Microelectronics Technology and Devices (SBMicro), 2026 40th Symposium on. :1-4 Aug, 2026
Relation: 2026 40th Symposium on Microelectronics Technology and Devices (SBMicro)
Βάση Δεδομένων: IEEE Xplore Digital Library
Περιγραφή
ISBN:9798319505194
9798319505200
ISSN:28324218
2832420X
DOI:10.1109/SBMicro70495.2026.11684422