Conference
Reducing Etching-Induced Frequency Spread in MEMS Resonators Through Shape-Optimized Mass Cells
| Τίτλος: | Reducing Etching-Induced Frequency Spread in MEMS Resonators Through Shape-Optimized Mass Cells |
|---|---|
| Συγγραφείς: | Marx, Tobias, Pfingstl, Simon, Horsting, Marian, Weig, Eva M., Wenzel, Matthias |
| Πηγή: | 2026 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2026 IEEE International Symposium on. :1-4 May, 2026 |
| Relation: | 2026 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
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