Conference
Reducing Etching-Induced Frequency Spread in MEMS Resonators Through Shape-Optimized Mass Cells
| Τίτλος: | Reducing Etching-Induced Frequency Spread in MEMS Resonators Through Shape-Optimized Mass Cells |
|---|---|
| Συγγραφείς: | Marx, Tobias, Pfingstl, Simon, Horsting, Marian, Weig, Eva M., Wenzel, Matthias |
| Πηγή: | 2026 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2026 IEEE International Symposium on. :1-4 May, 2026 |
| Relation: | 2026 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 9798331560898 9798331560904 |
|---|---|
| ISSN: | 23773480 23773464 |
| DOI: | 10.1109/INERTIAL69196.2026.11557762 |