Conference
Optimizing Niobium-Oxide Film Deposition via Pulsed-DC Sputtering by Dual-Stage Deep Neural Network-Gaussian Process Regression Framework
| Τίτλος: | Optimizing Niobium-Oxide Film Deposition via Pulsed-DC Sputtering by Dual-Stage Deep Neural Network-Gaussian Process Regression Framework |
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| Συγγραφείς: | Yang, Gaoqi, Tan, Jiajun, Zhu, Qingyun, Liang, Ling, Bao, Lin, Wang, Zongwei, Cai, Yimao |
| Πηγή: | 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2026 10th IEEE. :1-3 Mar, 2026 |
| Relation: | 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 9798331585983 9798331585990 |
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| DOI: | 10.1109/EDTM65772.2026.11497950 |