Conference
Research and Implementation of Measurement System for Non-Contact Film Thickness Based on Capacitance
| Τίτλος: | Research and Implementation of Measurement System for Non-Contact Film Thickness Based on Capacitance |
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| Συγγραφείς: | Chen, Mengwei, Chen, Yuxuan, Guo, Bing, Li, Chenyang, Luo, Yinghao, Xiang, Zipeng, Yang, Yingping |
| Πηγή: | 2025 5th International Conference on Electronic Information Engineering and Computer Technology (EIECT) Electronic Information Engineering and Computer Technology (EIECT), 2025 5th International Conference on. :114-117 Oct, 2025 |
| Relation: | 2025 5th International Conference on Electronic Information Engineering and Computer Technology (EIECT) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 9798331575243 9798331575236 9798331575250 |
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| DOI: | 10.1109/EIECT68017.2025.11331704 |