Research and Implementation of Measurement System for Non-Contact Film Thickness Based on Capacitance

Λεπτομέρειες βιβλιογραφικής εγγραφής
Τίτλος: Research and Implementation of Measurement System for Non-Contact Film Thickness Based on Capacitance
Συγγραφείς: Chen, Mengwei, Chen, Yuxuan, Guo, Bing, Li, Chenyang, Luo, Yinghao, Xiang, Zipeng, Yang, Yingping
Πηγή: 2025 5th International Conference on Electronic Information Engineering and Computer Technology (EIECT) Electronic Information Engineering and Computer Technology (EIECT), 2025 5th International Conference on. :114-117 Oct, 2025
Relation: 2025 5th International Conference on Electronic Information Engineering and Computer Technology (EIECT)
Βάση Δεδομένων: IEEE Xplore Digital Library
Περιγραφή
ISBN:9798331575243
9798331575236
9798331575250
DOI:10.1109/EIECT68017.2025.11331704