Large Language Model-Based Hierarchical Framework for Emerging Trends in Extreme Ultraviolet Research

Λεπτομέρειες βιβλιογραφικής εγγραφής
Τίτλος: Large Language Model-Based Hierarchical Framework for Emerging Trends in Extreme Ultraviolet Research
Συγγραφείς: Yoo, Sung Tae, Kim, Seonho, Lee, Jae-Min
Πηγή: 2025 37th International Conference on Microelectronics (ICM) Microelectronics (ICM), 2025 37th International Conference on. :1-5 Dec, 2025
Relation: 2025 International Conference on Microelectronics (ICM)
Βάση Δεδομένων: IEEE Xplore Digital Library