Conference
Large Language Model-Based Hierarchical Framework for Emerging Trends in Extreme Ultraviolet Research
| Τίτλος: | Large Language Model-Based Hierarchical Framework for Emerging Trends in Extreme Ultraviolet Research |
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| Συγγραφείς: | Yoo, Sung Tae, Kim, Seonho, Lee, Jae-Min |
| Πηγή: | 2025 37th International Conference on Microelectronics (ICM) Microelectronics (ICM), 2025 37th International Conference on. :1-5 Dec, 2025 |
| Relation: | 2025 International Conference on Microelectronics (ICM) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 9798331593704 9798331593711 |
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| ISSN: | 21591679 23327014 |
| DOI: | 10.1109/ICM66518.2025.11322531 |