Conference
Low-Temperature NiSi Formation via Microwave Annealing for Stable Metal-Induced Lateral Crystallization in 3D NAND Flash Memory
| Τίτλος: | Low-Temperature NiSi Formation via Microwave Annealing for Stable Metal-Induced Lateral Crystallization in 3D NAND Flash Memory |
|---|---|
| Συγγραφείς: | Kwon, Ohhyuk, Lee, Sunhyeong, Seo, Jongseon, Han, Geonhui, Kim, Dongmin, Park, Sejun, Lee, Junyoung, Park, Kwangmin, Yang, Siyoung, Choi, HanMei, Lee, Woosung, Hwang, Hyunsang |
| Πηγή: | 2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2025 Symposium on. :1-3 Jun, 2025 |
| Relation: | 2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
καταχωρήστε σχόλιο πρώτοι!