Academic Journal

Optimization of a 3-micron BCCD process for high density CCD registers

Λεπτομέρειες βιβλιογραφικής εγγραφής
Τίτλος: Optimization of a 3-micron BCCD process for high density CCD registers
Συγγραφείς: Ratner, Mark
Πηγή: Theses
Στοιχεία εκδότη: Digital Commons @ NJIT
Έτος έκδοσης: 1992
Συλλογή: Digital Commons @ New Jersey Institute of Technology (NJIT)
Θεματικοί όροι: Charge coupled devices -- Computer simulation, Mathematical optimization -- Computer programs, Electrical and Electronics
Περιγραφή: In July 1991, Dr. Walter F. Kosonocky proposed a High-Frame-Rate-CCD Imager. The design of the imager is such that the CCD channel width be 3-microns and capable of handling at least 3000 - 5000 electrons per square micron. Using process (SUPREM III) and device (PISCES IIB) simulations, charge handling capacities as a function of implant energy and junction depth were studied. Arsenic implants ranging from 100 to 200keV were driven-in to obtain junction depths between 0.40µm and 0.80µm. As a result of this work it was determined that charge handling capacities as high as 9400 electrons/µm2 were achievable with implanted doses of 1.6E12 ions/cm2. This thesis is a description of the simulation and analysis techniques used to optimize the charge handhng capacity of a 31.1m wide BCCD channel.
Τύπος εγγράφου: text
Περιγραφή αρχείου: application/pdf
Γλώσσα: unknown
Relation: https://digitalcommons.njit.edu/theses/2337; https://digitalcommons.njit.edu/context/theses/article/3351/viewcontent/njit_etd1992_106.pdf
Διαθεσιμότητα: https://digitalcommons.njit.edu/theses/2337
https://digitalcommons.njit.edu/context/theses/article/3351/viewcontent/njit_etd1992_106.pdf
Αριθμός Καταχώρησης: edsbas.F9C654B1
Βάση Δεδομένων: BASE
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