Strain-induced anodization of SiGe/Si multiple layers to form high density SiGe/Si heterogeneous nanorods

Λεπτομέρειες βιβλιογραφικής εγγραφής
Τίτλος: Strain-induced anodization of SiGe/Si multiple layers to form high density SiGe/Si heterogeneous nanorods
Συγγραφείς: Zhou B, Pan SW, Chen R, Chen SY, Li C, Lai HK, Yu, JZ, Zhu XF, Chen, SY, Xiamen Univ, Semicond Photon Res Ctr, Xiamen 361005, Peoples R China. E-mail Address: sychen@xmu.edu.cn
Έτος έκδοσης: 2009
Συλλογή: Institute of Semiconductors: SEMI OpenIR (Chinese Academy of Sciences) / 中国科学院半导体研究所机构知识库
Θεματικοί όροι: Strain-induced, Electrochemical Anodization, Silicon Germanium, Heterogeneous Nanostructures, Porous Silicon Layer, Visible Photoluminescence, Surface-morphology, Thin-films, Si, Germanium, Superlattices, Nanocrystals, Relaxation, Growth, 光电子学, surface contamination, thin films, metric system, silicon, metallic superlattices, development, 表面重构, surface morphology, surface reconstruction, films, thin, solid film, dielectric thin films, epitaxial layers, high-k dielectric thin films
Περιγραφή: SiGe/Si heterogeneous nanostructures are prepared by electrochemical anodization of SiGe/Si multiple layers grown by ultra-high vacuum chemical vapor deposition. Nanorods with densities up to similar to 2 x 10(11) cm(-2) have been observed with a relatively uniform distribution confirmed by scanning electron microscope images of both top and cross-sectional views. The samples show visible photoluminescence with multiple peaks and narrow widths which is related to the interference effect. Finally, a model is proposed to explain the role of strain during the anodization of SiGe/Si multiple layers. (C) 2009 Elsevier Ltd. All rights reserved.
Τύπος εγγράφου: report
Γλώσσα: English
Relation: SOLID STATE COMMUNICATIONS; Zhou B, Pan SW, Chen R, Chen SY, Li C, Lai HK, Yu, JZ, Zhu XF.Strain-induced anodization of SiGe/Si multiple layers to form high density SiGe/Si heterogeneous nanorods.SOLID STATE COMMUNICATIONS,2009,149(43-44):1897-1901; http://ir.semi.ac.cn/handle/172111/10199
Διαθεσιμότητα: http://ir.semi.ac.cn/handle/172111/10199
Αριθμός Καταχώρησης: edsbas.923C4162
Βάση Δεδομένων: BASE
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