rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: VLSI fabrication principles
    sub title: silicon and gallium arsenide
  title info:
    title: V.L.S.I. fabrication principles
  name:
    name part: Ghandhi, Sorab Khushro
    name part: 1928-
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: New York
    publisher: Wiley
    date issued: c1983
    date issued: 1983
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xi, 665 p.; ill.; 24 cm.
  note: Sorab K. Ghandhi
  note: "A Wiley-Interscience publication."
  note: Includes bibliographical references and index
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
  subject:
    topic: Silicon
  subject:
    topic: Gallium arsenide
  classification: 621.395
  identifier: 0471868337
  location:
    physical location: INST SAMOS 19971015
  record info:
    record content source: GR-MY-UA
    record creation date: 971015
    record identifier: 1/39568
    language of cataloging:
      language term: gre