Academic Journal
Chemical mechanical polishing of transparent conductive layers using spherical cationic polymer microbeads
| Τίτλος: | Chemical mechanical polishing of transparent conductive layers using spherical cationic polymer microbeads |
|---|---|
| Συγγραφείς: | Nagaoka, Shoji a, b, c, ⁎, Ryu, Naoya a, Yamanouchi, Akio b, Shirosaki, Tomohiro a, c, Horikawa, Maki a, b, c, Sakurai, Hideo b, c, Takafuji, Makoto b, c, Ihara, Hirotaka b, c |
| Πηγή: | In Thin Solid Films 2 February 2015 576:31-37 |
| Βάση Δεδομένων: | ScienceDirect |
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