Academic Journal
Chemical mechanical polishing of transparent conductive layers using spherical cationic polymer microbeads
| Title: | Chemical mechanical polishing of transparent conductive layers using spherical cationic polymer microbeads |
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| Authors: | Nagaoka, Shoji a, b, c, ⁎, Ryu, Naoya a, Yamanouchi, Akio b, Shirosaki, Tomohiro a, c, Horikawa, Maki a, b, c, Sakurai, Hideo b, c, Takafuji, Makoto b, c, Ihara, Hirotaka b, c |
| Source: | In Thin Solid Films 2 February 2015 576:31-37 |
| Database: | ScienceDirect |
| ISSN: | 00406090 |
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| DOI: | 10.1016/j.tsf.2014.12.028 |