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An Intelligent Computational Pipeline for Epitaxial Layer Thickness Estimation via Multi-Angle Spectral Interferometry

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Title: An Intelligent Computational Pipeline for Epitaxial Layer Thickness Estimation via Multi-Angle Spectral Interferometry
Authors: Li, Haocong, Yang, Hao, Lv, Yifan, Liu, Jingyi
Source: 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE) Electronics, Energy Systems and Power Engineering (EESPE), 2026 IEEE 2nd International Conference on. :2134-2139 Jun, 2026
Relation: 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE)
Database: IEEE Xplore Digital Library
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DbLabel: IEEE Xplore Digital Library
An: edseee.11648355
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AccessLevel: 2
PubType: Conference
PubTypeId: conference
PreciseRelevancyScore: 1160.62670898438
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: An Intelligent Computational Pipeline for Epitaxial Layer Thickness Estimation via Multi-Angle Spectral Interferometry
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Li%2C+Haocong%22">Li, Haocong</searchLink><br /><searchLink fieldCode="AR" term="%22Yang%2C+Hao%22">Yang, Hao</searchLink><br /><searchLink fieldCode="AR" term="%22Lv%2C+Yifan%22">Lv, Yifan</searchLink><br /><searchLink fieldCode="AR" term="%22Liu%2C+Jingyi%22">Liu, Jingyi</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE) Electronics, Energy Systems and Power Engineering (EESPE), 2026 IEEE 2nd International Conference on. :2134-2139 Jun, 2026
– Name: NoteTitleSource
  Label: Relation
  Group: SrcInfo
  Data: 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=edseee&AN=edseee.11648355
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/EESPE68405.2026.11648355
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 2134
    Titles:
      – TitleFull: An Intelligent Computational Pipeline for Epitaxial Layer Thickness Estimation via Multi-Angle Spectral Interferometry
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Li, Haocong
      – PersonEntity:
          Name:
            NameFull: Yang, Hao
      – PersonEntity:
          Name:
            NameFull: Lv, Yifan
      – PersonEntity:
          Name:
            NameFull: Liu, Jingyi
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 26
              M: 06
              Type: published
              Y: 2026
          Identifiers:
            – Type: isbn-print
              Value: 9798331570934
            – Type: isbn-print
              Value: 9798331570941
            – Type: issn-locals
              Value: edseee.IEEEConferenc
          Titles:
            – TitleFull: 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE), Electronics, Energy Systems and Power Engineering (EESPE), 2026 IEEE 2nd International Conference on
              Type: main
ResultId 1