Conference
An Intelligent Computational Pipeline for Epitaxial Layer Thickness Estimation via Multi-Angle Spectral Interferometry
| Τίτλος: | An Intelligent Computational Pipeline for Epitaxial Layer Thickness Estimation via Multi-Angle Spectral Interferometry |
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| Συγγραφείς: | Li, Haocong, Yang, Hao, Lv, Yifan, Liu, Jingyi |
| Πηγή: | 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE) Electronics, Energy Systems and Power Engineering (EESPE), 2026 IEEE 2nd International Conference on. :2134-2139 Jun, 2026 |
| Relation: | 2026 IEEE 2nd International Conference on Electronics, Energy Systems and Power Engineering (EESPE) |
| Βάση Δεδομένων: | IEEE Xplore Digital Library |
| ISBN: | 9798331570934 9798331570941 |
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| DOI: | 10.1109/EESPE68405.2026.11648355 |