Academic Journal
Edge Effect Compensation Algorithm for Eddy Current Endpoint Detection System in the CMP Process
| Title: | Edge Effect Compensation Algorithm for Eddy Current Endpoint Detection System in the CMP Process |
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| Authors: | Ting, L., Kang, Z., Jianwei, W., Jiubin, T. |
| Source: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 39(3):549-554 Aug, 2026 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2026.3705753 |