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Edge Effect Compensation Algorithm for Eddy Current Endpoint Detection System in the CMP Process

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Τίτλος: Edge Effect Compensation Algorithm for Eddy Current Endpoint Detection System in the CMP Process
Συγγραφείς: Ting, L., Kang, Z., Jianwei, W., Jiubin, T.
Πηγή: IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 39(3):549-554 Aug, 2026
Βάση Δεδομένων: IEEE Xplore Digital Library
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