Conference
High-k scaling for reliability enhancement in 300-mm-integrated WS2 FETs
| Title: | High-k scaling for reliability enhancement in 300-mm-integrated WS2 FETs |
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| Authors: | Panarella, Luca, Tyaginov, Stanislav, Smets, Quentin, Kaczer, Ben, Schram, Tom, Cott, Daire, De La Rosa, Cesar Javier Lockhart, Sankar Kar, Gouri, Afanas'Ev, Valeri |
| Source: | 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2026 10th IEEE. :1-3 Mar, 2026 |
| Relation: | 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9798331585983 9798331585990 |
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| DOI: | 10.1109/EDTM65772.2026.11497294 |