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Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond

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Title: Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond
Authors: Fang, X., Wu, J., Zheng, P., Ke, X., He, J., Sun, M., Huang, K., Zhang, S., Ou, X.
Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 35(2):301-311 Apr, 2026
Database: IEEE Xplore Digital Library
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: <searchLink fieldCode="AR" term="%22Fang%2C+X%2E%22">Fang, X.</searchLink><br /><searchLink fieldCode="AR" term="%22Wu%2C+J%2E%22">Wu, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Zheng%2C+P%2E%22">Zheng, P.</searchLink><br /><searchLink fieldCode="AR" term="%22Ke%2C+X%2E%22">Ke, X.</searchLink><br /><searchLink fieldCode="AR" term="%22He%2C+J%2E%22">He, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Sun%2C+M%2E%22">Sun, M.</searchLink><br /><searchLink fieldCode="AR" term="%22Huang%2C+K%2E%22">Huang, K.</searchLink><br /><searchLink fieldCode="AR" term="%22Zhang%2C+S%2E%22">Zhang, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Ou%2C+X%2E%22">Ou, X.</searchLink>
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  Data: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 35(2):301-311 Apr, 2026
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      – Type: doi
        Value: 10.1109/JMEMS.2026.3654965
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      Pagination:
        PageCount: 11
        StartPage: 301
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      – TitleFull: Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond
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            NameFull: Fang, X.
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            NameFull: Ke, X.
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            NameFull: He, J.
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              Type: published
              Y: 2026
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              Value: 2
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            – TitleFull: Journal of Microelectromechanical Systems, Microelectromechanical Systems, Journal of, J. Microelectromech. Syst.
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