Academic Journal
Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond
| Title: | Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond |
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| Authors: | Fang, X., Wu, J., Zheng, P., Ke, X., He, J., Sun, M., Huang, K., Zhang, S., Ou, X. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 35(2):301-311 Apr, 2026 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2026.3654965 |