Λεπτομέρειες βιβλιογραφικής εγγραφής
| Τίτλος: |
исследование влияния толщины тонких плЁнок РАЗЛИЧНОГО СОСТАВА, получаемых методом магнетронного распыления, на их оптическиЕ спектры пропускания: STUDY OF THE INFLUENCE OF THE THICKNESS OF THIN FILMS OF VARIOUS COMPOSITION PRODUCED BY MAGNETRON SPUTTERING ON THEIR OPTICAL TRANSMISSION SPECTRA |
| Πηγή: |
Vestnik of Volga State University of Technology. Series Radio Engineering and Infocommunication Systems. :64-71 |
| Στοιχεία εκδότη: |
Volga State University of Technology, 2021. |
| Έτος έκδοσης: |
2021 |
| Θεματικοί όροι: |
thin films, magnetron sputtering, graphite, тонкие плёнки, transmission spectrum, магнетронное распыление, графит, aluminum nitride, оксид меди, спектр пропускания, copper oxide, нитрид алюминия |
| Περιγραφή: |
В работе представлены измеренные оптические спектры пропускания плёнок графита, нитрида алюминия и оксида меди различной толщины, полученных методом магнетронного распыления. Показана зависимость оптического спектра пропускания плёнок графита от их толщины. Также приведены спектры пропускания комбинаций плёнок нитрида алюминия и оксида меди. Introduction. The existing methods for calculating thin-film interference filters are based on the priori known data on the thickness and refractive index values for each layer. The increasingly widespread method of magnetron sputtering for producing thin-film interference filters exhibits a number of features - one of them is that the refractive index of a thin film can vary within a fairly wide range. Thus, the aim of the research, which is to experimentally measure the optical transmission spectra of graphite, aluminum nitride and copper oxide films of various thicknesses, produced by magnetron sputtering, is topical. To achieve the aim, a number of tasks were posed: 1) Studying transmission spectra of thin films of aluminum nitride (AlN), copper oxide (CuO) and graphite (C) of various thicknesses, produced by magnetron sputtering; 2) Measuring thickness and surface structure of the thin films with the use of atomic force microscopy; 3) Studying transmission spectra of combinations of the produced films. Experimental technique. AlN, CuO, C thin films of various thicknesses were produced on K-8 glass substrates by magnetron sputtering. The transmission spectra of the thin films were recorded with the use of the SF-2000 spectrophotometer. Findings. Studies showed that graphite films change their optical characteristics, in particular, the short-wavelength boundary of the transmission spectrum at 218 nm, depending on the thickness in the range from 125 to 350 nm. These changes can be caused by the change in their crystal structure during growth. On the other hand, in AlN and CuO films produced by the method of reactive magnetron sputtering, this tendency was not observed, despite the fact that the range of thicknesses of these films overlaps the range of thicknesses of carbon films. These films are characterized only by a decrease in the transmittance with an increase in their thickness. The obtained transmission spectrum for combinations of aluminum nitride and copper oxide with graphite films allows to shift the transmission boundaries in the short-wavelength and long-wavelength parts of the spectrum and, due to this, increase the selectivity of the spectra of these thin-film structures. |
| Τύπος εγγράφου: |
Article |
| Γλώσσα: |
Russian |
| ISSN: |
2306-2819 |
| DOI: |
10.25686/2306-2819.2020.4.64 |
| Αριθμός Καταχώρησης: |
edsair.doi...........0a41a37064e7c00897e9c60c0bc7122b |
| Βάση Δεδομένων: |
OpenAIRE |