Optical Properties of TiO2 Films Deposited by Reactive Electron Beam Sputtering

Authors: Perevalov, T. V., Atuchin, Victor V., Gritsenko, V. A., Komonov, A. I., Korolkov, I. V., Pokrovsky, Lev D., Cheng Wei Shih, Chin, Albert, Kruchinin, Vladimir N.

Source: Journal of electronic materials. 2017. Vol. 46, № 10. P. 6089-6095

Subject Terms: электронно-лучевое напыление, оптические свойства, пленки диоксида титана, 0103 physical sciences, спетроскопическая эллипсометрия, 02 engineering and technology, 0210 nano-technology, 01 natural sciences

Access URL: https://link.springer.com/article/10.1007/s11664-017-5552-3
https://scholar.nycu.edu.tw/en/publications/optical-properties-of-tiosub2sub-films-deposited-by-reactive-elec
https://ir.nctu.edu.tw:443/handle/11536/146003
https://research.nsu.ru/en/publications/optical-properties-of-tiosub2sub-films-deposited-by-reactive-elec
http://ui.adsabs.harvard.edu/abs/2017JEMat..46.6089K/abstract
http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000644783