Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics

Authors: Barinov, A. D., Popov, A. I., Makarov, Alexander A.

Source: 31st European modeling and simulation symposium (EMSS 2019) : held at the International Multidisciplinary Modeling and Simulation Multiconference (I3M 2019), Lisbon, Portugal, 18-20 September 2019. [S. l.], 2019. P. 42-46

Subject Terms: алмазоподобные кремний-углеродные пленки, фазовый состав, химическая модификация, физическая модификация

File Description: application/pdf

Relation: koha:000708049; http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000708049

Availability: https://doi.org/10.46354/i3m.2019.emss.008
http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000708049